{"id":16,"date":"2023-06-19T15:38:58","date_gmt":"2023-06-19T06:38:58","guid":{"rendered":"http:\/\/app003.xsrv.jp\/kindai-u-fujita\/?page_id=16"},"modified":"2024-06-13T17:31:50","modified_gmt":"2024-06-13T08:31:50","slug":"publication","status":"publish","type":"page","link":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/publication\/","title":{"rendered":"\u767a\u8868\u5185\u5bb9"},"content":{"rendered":"\n
    \n
  1. \u5c0f\u897f\u9065\u5927, \u85e4\u7530 \u9686
    PCD\u30d6\u30ec\u30fc\u30c9\u5de5\u5177\u306b\u3088\u308b\u6a39\u8102\u6750\u6599\u3078\u306e\u30de\u30a4\u30af\u30ed\u6d41\u8def\u5f62\u6210\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76 
    \u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u5b66\u751f\u4f1a2021\u5e74\u5ea6\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u3000\u30002022\u5e743\u670815\u65e5<\/li>\n\n\n\n
  2. \u4f0a\u85e4\u7422\u6717, \u85e4\u7530 \u9686
    CMP\u7814\u78e8\u30d1\u30c3\u30c9\u306b\u304a\u3051\u308b\u5e7e\u4f55\u5b66\u7684\u30fb\u5316\u5b66\u7684\u7279\u6027\u306e\u7814\u7a76 
    \u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u5b66\u751f\u4f1a2021\u5e74\u5ea6\u5b66\u751f\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u3000\u30002022\u5e743\u670815\u65e5<\/li>\n\n\n\n
  3. \u5ca1\u672c\u6d77\u592a, \u85e4\u7530 \u9686
    \u30d5\u30a1\u30a4\u30d0\u30fc\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306b\u3088\u308b\u30d1\u30c3\u30c9\u8868\u9762\u57fa\u6e96\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6280\u8853\u306e\u958b\u767a
    \u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u5b66\u751f\u4f1a2021\u5e74\u5ea6\u5b66\u751f\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a\u3000\u30002022\u5e743\u670815\u65e5<\/li>\n\n\n\n
  4.  Haruto KONISHI, Takashi FUJITA, Yasuo IZUMI, Kouji WATANABE, Daisuke YANAGIDA, Hisashi MINAMI, Junji WATANABE, Study of fine groove machining using PCD(Poly-crystalline diamond) blade tool, Proceedings of 19th International Conference on Precision Engineering, Nov.28(Mon.)-Dec.2(Fri.) , 2022 Nara , Japan, C055 \u30102022\u5e74\u5ea6\u30de\u30b6\u30c3\u30af\u9ad8\u5ea6\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u512a\u79c0\u8ad6\u6587\u8cde<\/a>\u3011<\/li>\n\n\n\n
  5. Takuro ITO, Takashi FUJITA, Hirokuni HIYAMA, Yutaka WADA and Naoyuki HANDA, Study of polishing mechanism by chemical properties of polishing pad in oxide Chemical-Mechanical Planarization, Proceedings of 19th International Conference on Precision Engineering, Nov.28(Mon.)-Dec.2(Fri.) , 2022 Nara , Japan, C056<\/li>\n\n\n\n
  6. \u5c0f\u897f\u9065\u5927,\u85e4\u7530\u3000\u9686,\u798f\u6c38\u6dbc\u592a,\u548c\u6cc9\u5eb7\u592b,\u6e21\u9089\u7d14\u4e8c, PCD\u30d6\u30ec\u30fc\u30c9\u5de5\u5177\u306b\u3088\u308b\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76, 2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6, pp.248-249, C09<\/li>\n\n\n\n
  7. \u4f0a\u85e4\u7422\u6717,\u85e4\u7530\u3000\u9686,\u7c73\u672c\u9b41\u4eba,\u6a9c\u5c71\u6d69\u570b,\u548c\u7530\u96c4\u9ad8,\u5b89\u7530\u7a42\u7a4d,\u534a\u7530\u76f4\u5ec9, \u9178\u5316\u819cCMP\u306b\u304a\u3051\u308b\u7814\u78e8\u30d1\u30c3\u30c9\u8868\u9762\u72b6\u614b\u306e\u5e7e\u4f55\u5b66\u7684\u304b\u3064\u5316\u5b66\u7684\u306a\u5b9a\u91cf\u5316\u306e\u7814\u7a76, 2023\u5e74\u5ea6\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u6625\u5b63\u5927\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6, pp.781-782, G91<\/li>\n\n\n\n
  8. \u5ca1\u672c\u6d77\u592a\uff0c\u85e4\u7530\u3000\u9686\uff0c\u534a\u5c0e\u4f53\uff23\uff2d\uff30\u88c5\u7f6e\u306b\u304a\u3051\u308b\u30d1\u30c3\u30c9\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6280\u8853\u306e\u958b\u767a\uff0c\u7cbe\u5bc6\u5de5\u5b66\u4f1a2023\u5e74\u5ea6\u95a2\u897f\u5730\u65b9\u5b9a\u671f\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6, P.66-67<\/li>\n\n\n\n
  9. \u7c73\u672c\u9b41\u4eba, \u85e4\u7530 \u9686, \u4f0a\u85e4\u7422\u6717, \u6a9c\u5c71\u6d69\u570b, \u548c\u7530\u96c4\u9ad8, \u5b89\u7530\u7a42\u7a4d, \u5c0f\u7be0\u8ad2\u592a, \u534a\u5c0e\u4f53CMP\u7528\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u8868\u9762\u72b6\u614b\u306b\u3088\u308b\u7814\u78e8\u30e1\u30ab\u30cb\u30ba\u30e0\u306e\u89e3\u660e,\u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a2023\u5e74\u5ea6\u5e74\u6b21\u5927\u4f1a No.23-1, J132p-02<\/li>\n\n\n\n
  10. \u4f0a\u85e4\u7422\u6717, \u85e4\u7530 \u9686, \u5ca1\u672c\u6d77\u592a, CMP\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30d1\u30c3\u30c9\u8868\u9762\u57fa\u6e96\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30cb\u30f3\u30b0\u6280\u8853\u306e\u7814\u7a76,\u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a2023\u5e74\u5ea6\u5e74\u6b21\u5927\u4f1a No.23-1, J132p-08<\/li>\n\n\n\n
  11. \u4f0a\u85e4\u7422\u6717, \u85e4\u7530 \u9686, \u7c73\u672c\u9b41\u4eba, \u6a9c\u5c71\u6d69\u570b, \u548c\u7530\u96c4\u9ad8, \u5b89\u7530\u7a42\u7a4d, \u5c0f\u7be0\u8ad2\u592a,\u9178\u5316\u819cCMP \u306b\u304a\u3051\u308b\u7814\u78e8\u30d1\u30c3\u30c9\u8868\u9762\u306e\u5316\u5b66\u7684\u8a55\u4fa1\u306b\u3088\u308b\u7814\u78e8\u30ec\u30fc\u30c8\u3078\u306e\u5f71\u97ff\u306e\u7814\u7a76, \u7cbe\u5bc6\u5de5\u5b66\u4f1a\u79cb\u5b63\u5927\u4f1a\u5b66\u751f\u7814\u7a76\u767a\u8868\u4f1a(2023) 48.-49. 2023.9.13.\u3010\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u4f01\u696d\u8cde(\u6771\u4eac\u7cbe\u5bc6\u8cde)\u3011<\/li>\n\n\n\n
  12. \u5c0f\u897f\u9065\u5927, \u85e4\u7530 \u9686, \u798f\u6c38\u6dbc\u592a, \u548c\u6cc9 \u5eb7\u592b, \u6e21\u9089 \u7d14\u4e8c, PCD\u30d6\u30ec\u30fc\u30c9\u5de5\u5177\u306b\u3088\u308b\u5fae\u7d30\u52a0\u5de5\u6280\u8853\u306b\u95a2\u3059\u308b\u7814\u7a76(\u7b2c\uff12\u5831)\u7cbe\u5bc6\u5de5\u5b66\u4f1a\u79cb\u5b63\u5927\u4f1a\u5b66\u8853\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6(2023) 221-222. 2023.9.14.<\/li>\n\n\n\n
  13. Takuro Ito, Takashi Fujita, Kaito Yonemoto, Yuki Arai, Hiroyuki Hiyama, Yutaka Wada, Hozumi Yasuda, Ryota Koshino, Polishing Mechanism Based on Morphological and Chemical Quantification of Pad Surface in Chemical Mechanical Planarization, International Conference on Planarization Technology O17-001-O17-008\u30102023\u5e74\u5ea6\u30de\u30b6\u30c3\u30af\u9ad8\u5ea6\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u512a\u79c0\u8ad6\u6587\u8cde\u3011<\/li>\n\n\n\n
  14. Haruto Konishi, Takashi Fujita, Ryota Fukunaga, Yasuo Izumi, Junji Watanabe, Mirror-finishing technology for SiC substrates using PCD tools with high-density cutting edges, International Conference on Planarization Technology P62-001-P62-004<\/li>\n\n\n\n
  15. \u798f\u6c38\u6dbc\u592a, \u85e4\u7530 \u9686, \u5c0f\u897f\u9065\u5927, \u548c\u6cc9\u5eb7\u592b, \u6e21\u9089\u7d14\u4e8c, PCD\u30d6\u30ec\u30fc\u30c9\u306b\u3088\u308b\u8d85\u97f3\u6ce2\u8a3a\u65ad\u88c5\u7f6e\u7528\u306e\u5fae\u7d30\u5727\u96fb\u30d7\u30ed\u30fc\u30d6\u5f62\u6210\u306b\u95a2\u3059\u308b\u57fa\u790e\u7684\u7814\u7a76, \u7cbe\u5bc6\u5de5\u5b66\u4f1a\u4e2d\u56fd\u56db\u56fd\u652f\u90e8\u5e83\u5cf6\u5730\u65b9\u8b1b\u6f14\u4f1a\u8b1b\u6f14\u8ad6\u6587\u96c6(2023) 53-54 \u3010\u30d9\u30b9\u30c8\u30d7\u30ec\u30bc\u30f3\u30c6\u30fc\u30b7\u30e7\u30f3\u8cde\u30112023.12.06<\/li>\n\n\n\n
  16. \u6cc9\u8c37\u60a0\u7dba, \u85e4\u7530 \u9686, PCD\u30d6\u30ec\u30fc\u30c9\u306b\u3088\u308bSiC\u57fa\u677f\u52a0\u5de5\u6280\u8853\u306e\u7814\u7a76\u000b\u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u5b66\u751f\u4f1a2023\u5e74\u5ea6\u5b66\u751f\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a 05PM1-5 2024.3.14.<\/li>\n\n\n\n
  17. \u6a4b\u672c\u6cbb\u6a39, \u85e4\u7530 \u9686, \u30d5\u30a1\u30a4\u30d0\u30fc\u30b3\u30f3\u30c7\u30a3\u30b7\u30e7\u30ca\u30fc\u306b\u3088\u308bCMP\u30d1\u30c3\u30c9\u8868\u9762\u306e\u5fae\u7d30\u5316\u51e6\u7406\u6280\u8853\u306e\u7814\u7a76,\u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u5b66\u751f\u4f1a2023\u5e74\u5ea6\u5b66\u751f\u54e1\u5352\u696d\u7814\u7a76\u767a\u8868\u8b1b\u6f14\u4f1a 17PM1-3 2024.3.14.
    \u3010\u7b2c45\u6b21\u5de5\u4f5c\u6a5f\u68b0\u6280\u8853\u632f\u8208\u8cde\u30fb\u5968\u52b1\u8cde\u3011<\/li>\n\n\n\n
  18. \u798f\u6c38\u6dbc\u592a, \u85e4\u7530\u9686, \u5c0f\u897f\u9065\u5927, \u548c\u6cc9\u5eb7\u592b, \u6e21\u9089\u7d14\u4e8c,\u8d85\u97f3\u6ce2\u5727\u96fb\u7d50\u6676\u306e\u5fae\u7d30\u6e9d\u52a0\u5de5\u306b\u304a\u3051\u308bPCD\u5de5\u5177\u306e\u5207\u308c\u5203\u72b6\u614b\u8a55\u4fa1\u306e\u7814\u7a76, \u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u652f\u90e8\u7b2c99\u671f\u5b9a\u6642\u7dcf\u4f1a\u8b1b\u6f14\u4f1a, No.244-1, P230 2024.03.15<\/li>\n\n\n\n
  19. \u7c73\u672c\u9b41\u4eba, \u85e4\u7530 \u9686, \u4f0a\u85e4\u7422\u6717, \u6a9c\u5c71\u6d69\u570b, \u548c\u7530\u96c4\u9ad8, \u5b89\u7530\u7a42\u7a4d, \u5c0f\u7be0\u8ad2\u592a, \u534a\u5c0e\u4f53CMP\u7528\u7814\u78e8\u30d1\u30c3\u30c9\u306e\u8868\u9762\u72b6\u614b\u306b\u304a\u3051\u308b\u30b3\u30f3\u30bf\u30af\u30c8\u30a8\u30ea\u30a2\u306e\u5b9a\u91cf\u7684\u8a55\u4fa1, \u65e5\u672c\u6a5f\u68b0\u5b66\u4f1a\u95a2\u897f\u652f\u90e8\u7b2c99\u671f\u5b9a\u6642\u7dcf\u4f1a\u8b1b\u6f14\u4f1a, No.244-1, P130 2024.03.15<\/li>\n\n\n\n
  20. \u85e4\u7530\u3000\u9686, \u713c\u7d50\u30c0\u30a4\u30e4\u30e2\u30f3\u30c9\u7814\u524a\u5de5\u5177\u306b\u3088\u308b\u5fae\u7d30\u93e1\u9762\u52a0\u5de5\u6280\u8853, \u7825\u7c92\u52a0\u5de5\u5b66\u4f1a \u95a2\u897f\u5730\u533a\u90e8\u4f1a \u4ee4\u548c6\u5e74\u5ea6\u7b2c1\u56de\u7814\u7a76\u4f1a, 2024.03.22<\/li>\n<\/ol>\n\n\n\n
    <\/div>\n","protected":false},"excerpt":{"rendered":"","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"_links":{"self":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/pages\/16"}],"collection":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/comments?post=16"}],"version-history":[{"count":32,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/pages\/16\/revisions"}],"predecessor-version":[{"id":483,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/pages\/16\/revisions\/483"}],"wp:attachment":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/media?parent=16"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}