{"id":382,"date":"2023-10-31T17:37:00","date_gmt":"2023-10-31T08:37:00","guid":{"rendered":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/?p=382"},"modified":"2024-06-21T17:50:41","modified_gmt":"2024-06-21T08:50:41","slug":"post-382","status":"publish","type":"post","link":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/post-382\/","title":{"rendered":"\u534a\u5c0e\u4f53CMP\u6280\u8853\u306e\u56fd\u969b\u4f1a\u8b70 ICPT2023\u304c\u958b\u50ac<br>M2\u4f0a\u85e4\u541b\u3068M2\u5c0f\u897f\u541b\u304c\u767a\u8868"},"content":{"rendered":"\n<p>\u77f3\u5ddd\u770c\u91d1\u6ca2\u5e02\u306e\u91d1\u6ca2\u6771\u6025\u30db\u30c6\u30eb\u3067\u958b\u50ac\u3055\u308c\u305f\u534a\u5c0e\u4f53CMP\u6280\u8853\u306e\u56fd\u969b\u4f1a\u8b70 ICPT2023\u304c\u958b\u50ac\u3055\u308c\u307e\u3057\u305f\u3002\u5f53\u7814\u7a76\u5ba4\u304b\u3089\u3001M2\u4f0a\u85e4\u7422\u6717\u541b\u3068M2\u5c0f\u897f\u9065\u5927\u541b\u304c\u767a\u8868\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>Takuro Ito, Takashi Fujita, Kaito Yonemoto, Yuki Arai, Hiroyuki Hiyama, Yutaka Wada, Hozumi Yasuda, Ryota Koshino, Polishing Mechanism Based on Morphological and Chemical Quantification of Pad Surface in Chemical Mechanical Planarization, International Conference on Planarization Technology O17-001-O17-008<\/p>\n\n\n\n<p>Haruto Konishi, Takashi Fujita, Ryota Fukunaga, Yasuo Izumi, Junji Watanabe, Mirror-finishing technology for SiC substrates using PCD tools with high-density cutting edges, International Conference on Planarization Technology P62-001-P62-004<\/p>\n\n\n\n<div style=\"height:20px\" aria-hidden=\"true\" class=\"wp-block-spacer\"><\/div>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-1 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-large\"><img loading=\"lazy\" decoding=\"async\" width=\"722\" height=\"1024\" src=\"http:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-722x1024.jpg\" alt=\"\" class=\"wp-image-383\" srcset=\"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-722x1024.jpg 722w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-212x300.jpg 212w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-768x1089.jpg 768w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-1084x1536.jpg 1084w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-1445x2048.jpg 1445w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50-670x950.jpg 670w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image50.jpg 1720w\" sizes=\"(max-width: 722px) 100vw, 722px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"534\" height=\"401\" src=\"http:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image51.jpeg\" alt=\"\" class=\"wp-image-384\" srcset=\"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image51.jpeg 534w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image51-300x225.jpeg 300w\" sizes=\"(max-width: 534px) 100vw, 534px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\"><\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u77f3\u5ddd\u770c\u91d1\u6ca2\u5e02\u306e\u91d1\u6ca2\u6771\u6025\u30db\u30c6\u30eb\u3067\u958b\u50ac\u3055\u308c\u305f\u534a\u5c0e\u4f53CMP\u6280\u8853\u306e\u56fd\u969b\u4f1a\u8b70 ICPT2023\u304c\u958b\u50ac\u3055\u308c\u307e\u3057\u305f\u3002\u5f53\u7814\u7a76\u5ba4\u304b\u3089\u3001M2\u4f0a\u85e4\u7422\u6717\u541b\u3068M2\u5c0f\u897f\u9065\u5927\u541b\u304c\u767a\u8868\u3057\u307e\u3057\u305f\u3002 Takuro Ito, Takashi Fujita,  [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":383,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1,3],"tags":[],"_links":{"self":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/382"}],"collection":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/comments?post=382"}],"version-history":[{"count":8,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/382\/revisions"}],"predecessor-version":[{"id":566,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/382\/revisions\/566"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/media\/383"}],"wp:attachment":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/media?parent=382"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/categories?post=382"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/tags?post=382"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}