{"id":421,"date":"2024-05-22T17:58:00","date_gmt":"2024-05-22T08:58:00","guid":{"rendered":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/?p=421"},"modified":"2024-06-21T17:29:57","modified_gmt":"2024-06-21T08:29:57","slug":"post-421","status":"publish","type":"post","link":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/post-421\/","title":{"rendered":"\u4f0a\u85e4\u541b(\u4fee\u4e86\u751f)\u304c\u30de\u30b6\u30c3\u30af\u8ca1\u56e3\u306e\u9ad8\u5ea6\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u512a\u79c0\u8ad6\u6587\u8cde\u3092\u53d7\u8cde"},"content":{"rendered":"\n<p>\u5f53\u7814\u7a76\u5ba4\u306e\u4fee\u4e86\u751f\u3067\u3042\u308b\u4f0a\u85e4\u541b\u304c\u30de\u30b6\u30c3\u30af\u8ca1\u56e3\u306e\u9ad8\u5ea6\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u512a\u79c0\u8ad6\u6587\u8cde\u3092\u53d7\u8cde\u3057\u307e\u3057\u305f\u3002\u6628\u5e7410\u6708\u672b\u306b\u91d1\u6ca2\u3067\u958b\u50ac\u3055\u308c\u305fCMP\u56fd\u969b\u4f1a\u8b70\u3067\u767a\u8868\u3057\u305f\u8b1b\u6f14\u8ad6\u6587\u304c\u9078\u3070\u308c (\u767a\u8868\u6642\uff1a\u4fee\u58eb2\u5e74\u3001\u73fe\uff1a\u834f\u539f\u88fd\u4f5c\u6240)\u30015\u670822\u65e5\u306b\u6388\u8cde\u5f0f\u304c\u3042\u308a\u307e\u3057\u305f\u3002\u8fd1\u5927\u7406\u5de5\u901a\u4fe1\u7528\u306b\u5199\u771f\u3092\u9001\u3063\u3066\u304f\u308c\u307e\u3057\u305f\u3002\u3042\u308a\u304c\u3068\u3046\u3054\u3056\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-1 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:33.33%\">\n<figure class=\"wp-block-image size-full\"><img loading=\"lazy\" decoding=\"async\" width=\"371\" height=\"495\" src=\"http:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image70-rotated.jpeg\" alt=\"\" class=\"wp-image-422\" srcset=\"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image70-rotated.jpeg 371w, https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-content\/uploads\/2024\/06\/image70-225x300.jpeg 225w\" sizes=\"(max-width: 371px) 100vw, 371px\" \/><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\" style=\"flex-basis:66.66%\">\n<p>Takuro Ito, Takashi Fujita, Kaito Yonemoto, Yuki Arai, Hiroyuki Hiyama, Yutaka Wada, Hozumi Yasuda, Ryota Koshino, Polishing Mechanism Based on Morphological and Chemical Quantification of Pad Surface in Chemical Mechanical Planarization, International Conference on Planarization Technology O17-001-O17-008<\/p>\n<\/div>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>\u5f53\u7814\u7a76\u5ba4\u306e\u4fee\u4e86\u751f\u3067\u3042\u308b\u4f0a\u85e4\u541b\u304c\u30de\u30b6\u30c3\u30af\u8ca1\u56e3\u306e\u9ad8\u5ea6\u751f\u7523\u30b7\u30b9\u30c6\u30e0\u512a\u79c0\u8ad6\u6587\u8cde\u3092\u53d7\u8cde\u3057\u307e\u3057\u305f\u3002\u6628\u5e7410\u6708\u672b\u306b\u91d1\u6ca2\u3067\u958b\u50ac\u3055\u308c\u305fCMP\u56fd\u969b\u4f1a\u8b70\u3067\u767a\u8868\u3057\u305f\u8b1b\u6f14\u8ad6\u6587\u304c\u9078\u3070\u308c (\u767a\u8868\u6642\uff1a\u4fee\u58eb2\u5e74\u3001\u73fe\uff1a\u834f\u539f\u88fd\u4f5c\u6240)\u30015\u670822\u65e5\u306b\u6388\u8cde\u5f0f\u304c\u3042\u308a [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":422,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[1,3],"tags":[],"_links":{"self":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/421"}],"collection":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/comments?post=421"}],"version-history":[{"count":3,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/421\/revisions"}],"predecessor-version":[{"id":548,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/posts\/421\/revisions\/548"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/media\/422"}],"wp:attachment":[{"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/media?parent=421"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/categories?post=421"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/app003.xsrv.jp\/kindai-u-fujita\/wp-json\/wp\/v2\/tags?post=421"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}