10月24-26日、International Conference on Precision Engineering (ICPE)が東北大学で開催されました。
当研究室から、D1の小西遥大君、M1の橋本治樹君が発表しました。
Haruto Konishi, Takashi Fujita, Ryota Fukunaga, Yuki Izutani, Yasuo Izumi andJunji Watanabe, Evaluation on fine cutting edges of PCD grinding tool and mirror finishing surface on SiC substrates, Proceedings of ICPE2024: The 20th International Conference on Precision Engineering, 23-27 October 2024, Paper No. OS06-16 (4P)
Haruki Hashimoto, Takashi Fujita, Study of technology for fine conditioning of pad surfaces with fiber conditioner in CMP, Proceedings of ICPE2024: The 20th International Conference on Precision Engineering, 23-27 October 2024, Paper No. OS11-17 (4P)
